Vacuum-Assisted Ex situ Lift Out for Plan View FIB Specimen Preparation
نویسندگان
چکیده
منابع مشابه
Theory and New Applications of Ex Situ Lift Out.
The ex situ lift out (EXLO) adhesion forces are reviewed and new applications of EXLO for focused ion beam (FIB)-prepared specimens are described. EXLO is used to manipulate electron transparent specimens on microelectromechanical systems carrier devices designed for in situ electron microscope analysis. A new patented grid design without a support film is described for EXLO. This new slotted g...
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Inductively coupled plasma sources are capable of producing Xe + ions for commercial focused ion beam (FIB) applications [1,2]. It should be no surprise that the longstanding Ga + FIB strategies for transmission electron microscopy (TEM) specimen preparation are directly applicable and transferrable to the plasma FIB (PFIB). Indeed, we showed a few years ago that the Xe + PFIB can produce elect...
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The removal of a thinned lamella from a bulk sample for Transmission Electron Microscopy (TEM) analysis has been possible in the Focused Ion Beam Scanning Electron Microscope (FIB-SEM) for over 20 years either via in situ (by use of a micromanipulator) or ex situ lift-out approaches [1]. Both offer swift, site specific preparation for TEM analysis, particularly in light of advancements in corre...
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The focused-ion-beam (FIB) is the method of choice for site-specific sample preparation for Transmission Electron Microscopy (TEM) in material sciences. A lamella can be physically lifted out from a specific region of a bulk specimen with submicrometer precision and thinned to electron transparency for high-resolution imaging in the TEM. The possibility to use this tool in life sciences applica...
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When examining thin films using transmission electron microscopy (TEM), it is usually necessary to image a cross-section of the film (i.e. parallel to the film). However sometimes it is favourable to image thin films in plan-view (i.e. perpendicular to the film). This is the case for Co-doped FeSi thin films, which possess chiral symmetry along certain zone axes. In order to view these zone axe...
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ژورنال
عنوان ژورنال: Microscopy and Microanalysis
سال: 2018
ISSN: 1431-9276,1435-8115
DOI: 10.1017/s1431927618004658